
| Equipment | Mech. Booster + Dry Screw Pump |
|---|---|
| Stag | 2-Stage |
| Type | Oill & Water Free |
| System | lnner Piping (Expansion) |
| Base Plate | One Skid Mounted |
| PIC | Vacuum lndicator Controller |
|---|---|
| Panel | Local & PLC, MCC |
| Moter | eG3, d2G4 |
| Utility | Air, C.W ln/Out lnner Piping |
| Specification/Model | Unit | 3MD4000 | 3MD6000 | 3MD8000 | 3MD10000 | 3MD15000 | |
|---|---|---|---|---|---|---|---|
| Pumping Speed | 1st M3/hr | 600 | 1,200 | 1,500 | 2,000 | 3,000 | |
| 2st M3/hr | 150 | 300 | 300 | 400 | 800 | ||
| Rotation Speed 50/60Hz | RPM | 2900/3500 | |||||
| Ultimate Pre. | mbar | 0.005 | 0.001 | 0.001 | 0.0001 | ||
| torr | 0.00375 | 0.00075 | 0.00075 | 0.00075 | |||
| Motor rating. 1st/2nd | kw | 3.7/7.5 | 3.7/11 | 3.7/11 | 7.5/22 | ||
| Noise | dB | 75 | 85 | 85 | 85 | ||
| Gear oil. 1st/2nd | L | 1.7/1.3 | 2.7/1.6 | 4.1/1.6 | 4.1/2 | ||
| Port Size | Suction | A | 80 | 100 | 100 | 6B | 8B |
| Discharge | A | 40 | 40 | 40 | 150 | 200 | |
| Weight | Kg | 115/230 | 208/350 | 208/350 | 245/420 | 280/630 | |
| Mechanical Booster | ||
|---|---|---|
| Rotor | Ductile lron | |
| Casing | Ductile lron | |
| Shaft | steel | |
| Timing Gear | Heat Treated Alloy Steel | |
| Helical Precision Grounded | ||
| O-Ring | Viton | |
| (Option : Kalrez, Teflon) | ||
| Seal Configuration | Drive | Oil Seal or Lip Seal |
| Non Drive | Lip Seal | |
| Dry Screw Vacuum Pump | ||
|---|---|---|
| Screw | Ductile lron | |
| Casing | Cast lron | |
| Shaft | Ductile lron | |
| Timing Gear | Heat Treated Alloy Steel | |
| Helical Precision Grounded | ||
| O-Ring | Viton | |
| (Option : Kalrez, Teflon) | ||
| Seal Configuration | Drive | Bellows Mech Seal or Lip Seal |
| Non Drive | Lip Seal | |

| Equipment | #Mech. Booster Pump +# M/Booster + Dry Screw Pump |
|---|---|
| Stag | 3-Stage |
| Type | Oil & Water Free |
| System | lnner Piping (Expansion) |
| Base Plate | One Skid Mounted |
| PIC | Vacuum lndicator Controller |
|---|---|
| Panel | Local & PLC, MCC |
| Moter | eG3, d2G4 |
| Utility | Air, C.W ln/Out lnner Piping |
| Specification/Model | Unit | 3MD4000 | 3MD6000 | 3MD8000 | 3MD10000 | 3MD15000 | |
|---|---|---|---|---|---|---|---|
| Pumping Speed | 1st M3/hr | 4,000 | 6,000 | 8,000 | 10,000 | 15,000 | |
| 2st M3/hr | 1,200 | 2,000 | 2,500 | 3,000 | 4,000 | ||
| Back M3/hr | 300 | 400 | 800 | 800 | 800 | ||
| Rotation Speed 50/60Hz | RPM | 2900/3500 | |||||
| Ultimate Pre. | mbar | 0.005 | 0.001 | 0.001 | 0.0001 | ||
| torr | 0.00375 | 0.00075 | 0.00075 | 0.00075 | |||
| Motor rating. 1st/2nd | kw | 7.3/3.7/11 | 11/7.5//15 | 22/7.5/22 | 30/11/22 | ||
| Noise | dB | 85 | 85 | 85 | 85 | ||
| Gear oil. 1st/2nd | L | 1.7/1.0 | 2.7/1.6 | 4.1/3 | 4.1/4 | ||
| Port Size | Suction | A | 200 | 250 | 250 | 300 | 350 |
| Discharge | A | 40 | 50 | 65 | 65 | 65 | |
| Weight | Kg | / | / | / | / | / | |
| Mechanical Booster | ||
|---|---|---|
| Rotor | Ductile lron | |
| Casing | Ductile lron | |
| Shaft | steel | |
| Timing Gear | Heat Treated Alloy Steel | |
| Helical Precision Grounded | ||
| O-Ring | Viton | |
| (Option : Kalrez, Teflon) | ||
| Seal Configuration | Drive | Oil Seal or Lip Seal |
| Non Drive | Lip Seal | |
| Dry Screw Vacuum Pump | ||
|---|---|---|
| Screw | Ductile lron | |
| Casing | Cast lron | |
| Shaft | Ductile lron | |
| Timing Gear | Heat Treated Alloy Steel | |
| Helical Precision Grounded | ||
| O-Ring | Viton | |
| (Option : Kalrez, Teflon) | ||
| Seal Configuration | Drive | Bellows Mech Seal or Lip Seal |
| Non Drive | Lip Seal | |