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V Series

VPS-V Series

VPS-V

As a technology oriented manufacturer, we have rich knowledge and experience to develop and supply high-quality and high-reliability products for various industries.
Semiconductor
Solar
LED manufacture
New energy batteries
1Dust filtration
  • The intake flange is equipped with a filter screen in order to screen the dust and reduce mechanical failures caused by dust.
2Motor
  • The motor is cantilever type, not use bearings and couplings, small size and low failure rate.
  • Epoxy resin casting: not use tank sealing between the stator and rotor to improve the motor efficiency
3Seal
  • Both sides are sealed with labyrinth seals and bi-directional lip seals and nitrogen seals (on the motor side). Ensure effective sealing to maintain the performance of vacuum pump.
4Cooling
  • Large area cooling structure to avoid mechanical problems caused by overheating.
  • No solenoid valve to control the cooling water switch to avoid high temperature faults caused by solenoid valve blockage or damage.
  • The water inlet can be equipped with an optional filter to better avoid water pipe blockage.
  • External cooling water pipe for easy maintenance in later use.
  • The cooling water pipes are made of SUS material and the connecting sleeve are imported parts. The working life is longer.

Features and advantages

Compact structure
  • Few components, convenient for later installation and maintenance
  • Small footprint
High pumping efficiency
  • Excellent rotor design and appropriate compression ratio
  • High-speed motors
High reliability
  • Important components such as bearings, lip seals, vacuum pump oil and frequency converters are all imported parts
  • The electronic control system has rich parameter settings and parameter monitoring modules

VS Series Hybrid screw rotor

Features
  • Low ultimate vacuum degree
  • Without internal compression, the process gas will not be compressed and condensed inside the chamber
  • Easy Powder Handling

Specification

Model VS250 VS700 VS1400 VS2000
Ultimate pressure Torr 3.75E-03 7.50E-04
Pa 0.5 0.1
Pumping speed m3/h 250 700 1400 2000
l/min 4160 11660 23330 33330
Cooling water l/min 4 ~ 7
Power at ultimate kW 2.6 3 3.4 3.6
Purge gas l/min 0 ~ 100
Electrical 3Φ 380V 50Hz
Weight Kg 180 340 380 420
Noise dBA ≤70
Inlet flange size KF50 ISO100 ISO160
Out flange size KF40
External dimensions mm 780x410x570 780x410x810 920x410x1065

Performance

VD Series Variable screw

Features
  • High pressure section pumping speed is fast
  • Low energy consumption
  • Low noise

Specification

Model VD250 VD350 VD650 VD700 VD1400 VD2000 VD2600 VD4200
Ultimate pressure Torr 3.75E-03 7.50E-04
Pa 0.5 0.1
Pumping speed m3/h 250 350 650 700 1400 2000 2600 4200
l/min 4160 5830 10830 11660 23330 33330 43330 72000
Cooling water l/min 4 ~ 7 8 ~ 12
Power at ultimate kW 4.2 5 11 4.5 4.8 5.2 6.1 12.2
Purge gas l/min 0 ~ 100
Electrical 3Φ 380V 50Hz
Weight kg 280 300 620 400 640 650 700 1160
Noise dBA ≤70 ≤75
Inlet flange size KF50 ISO100 ISO160 ISO200
Outlet flange size KF40 KF50
External dimensions mm 820x450x620 875x450x620 1220x550x760 830x450x930 870x450x980 950x450x1000 1220x550x1160

Performance